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Decachlorotetrasilane; DCTS; Si4Cl10데카클로로테트라실란13763-19-4Cl10Si4
Dodecachloroneopentasilane; Dodekachlorneopentasilan; NPCS; Si5Cl12; Cl12Si5
Octachlorotrisilane; OCTS; Si3Cl813596-23-1Cl8Si3
Hexachlorodisilane; HCDS; Si2Cl6헥사클로로디실란13465-77-5Cl6Si2
Pentachlorodisilane; PCDS; Si2Cl5H31411-98-0Cl5HSi2
Dodecachloroneopentasilane; NCPS; Si5Cl1250350-62-4Cl12Si5
Tetrachlorodisilane; TCDS; Si2Cl4H299995-72-9Cl4H2Si2
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