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TRIS(DIMETHYLAMINO)SILANE

TRIS(DIMETHYLAMINO)SILANE structure

CAS No.: 15112-89-7

Chemical Name:: TRIS(DIMETHYLAMINO)SILANE

Synonyms: TDMAS;3DMAS;DK087;LS 1460;amino)siL;(Me2N)3SiH;3DMAS : [(CH3)2N]3SiH;Tris(dimethyamino)silane;Tri(dimethylamino)silane;TRIS(DIMETHYLAMINO)SILANE

CBNumber:: CB1241150

Molecular Formula:: C6H19N3Si

Molecular Weight:: 161.32

MDL Number:: MFCD00048006

MOL File:: 15112-89-7.mol

MSDS File:: SDS

Last updated:2023-04-23 13:52:06

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TRIS(DIMETHYLAMINO)SILANE Properties

Melting point	<0°C
Boiling point	145 °C
Density	0,838 g/cm³
refractive index	1.4247
Flash point	25°C
pka	10.93±0.70(Predicted)
form	liquid
color	colorless to light yellow
Specific Gravity	0.84
Sensitive	air sensitive, moisture sensitive
Hydrolytic Sensitivity	8: reacts rapidly with moisture, water, protic solvents
EPA Substance Registry System	N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7)

SAFETY

Risk and Safety Statements

Symbol(GHS)	GHS02,GHS05,GHS06
Signal word	Danger
Hazard statements	H225-H261-H302-H311-H314-H330
Precautionary statements	P210-P231+P232-P280-P303+P361+P353-P304+P340+P310-P305+P351+P338
Hazard Codes	F,C
Risk Statements	10-36/37/38-52/53-34-29-20-15-11
Safety Statements	16-26-36/37/39-45-43
RIDADR	1993
WGK Germany	3
RTECS	VV5800000
TSCA	Yes
Toxicity	rabbit,LD50,skin,477mg/kg (477mg/kg),LIVER: OTHER CHANGESLUNGS, THORAX, OR RESPIRATION: CHRONIC PULMONARY EDEMA,Toxicology and Industrial Health. Vol. 5, Pg. 45, 1989.

TRIS(DIMETHYLAMINO)SILANE price More Price(7)

Manufacturer	Product number	Product description	CAS number	Packaging	Price	Updated	Buy
Sigma-Aldrich	759562	Tris(dimethylamino)silane packaged for use in deposition systems	15112-89-7	25g	$980	2024-03-01	Buy
Sigma-Aldrich	570133	Tris(dimethylamino)silane electronic grade, 99.999%	15112-89-7	25g	$214	2024-03-01	Buy
Strem Chemicals	14-8750	Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM	15112-89-7	5g	$75	2024-03-01	Buy
Strem Chemicals	14-8750	Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM	15112-89-7	25g	$214	2024-03-01	Buy
Strem Chemicals	98-4035	Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD	15112-89-7	25g	$1211	2024-03-01	Buy

Product number	Packaging	Price	Buy
759562	25g	$980	Buy
570133	25g	$214	Buy
14-8750	5g	$75	Buy
14-8750	25g	$214	Buy
98-4035	25g	$1211	Buy

TRIS(DIMETHYLAMINO)SILANE Chemical Properties,Uses,Production

Uses

Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.

General Description

Please inquire for quantity, pricing, and packaging options.

TRIS(DIMETHYLAMINO)SILANE Preparation Products And Raw materials

Raw materials

Preparation Products

TRIS(DIMETHYLAMINO)SILANE Suppliers

Global( 89)Suppliers

Supplier	Tel	Email	Country	ProdList	Advantage
Shanghai Daken Advanced Materials Co.,Ltd	+86-371-66670886	info@dakenam.com	China	15371	58
ATK CHEMICAL COMPANY LIMITED	+undefined-21-51877795	ivan@atkchemical.com	China	32480	60
Win-Win Chemical CO., Limited	0086-577-64498589	sales@win-winchemical.com	CHINA	998	58
Hubei Jusheng Technology Co.,Ltd.	18871490254	linda@hubeijusheng.com	CHINA	28180	58
career henan chemical co	+86-0371-86658258 15093356674;	factory@coreychem.com	China	29826	58
Hubei Co-Formula Material Tech Co., Ltd.	+86-27-84459282	sales@cfmats.com	CHINA	882	58
Shaanxi Dideu Medichem Co. Ltd	18192627656	1012@dideu.com	China	3504	58
Fuxin Pharmaceutical	+86-021-021-50872116 +8613122107989	contact@fuxinpharm.com	China	10297	58
Antai Fine Chemical Technology Co.,Limited	18503026267	info@antaichem.com	CHINA	9641	58
Hefei TNJ Chemical Industry Co.,Ltd.	0551-65418671	sales@tnjchem.com	China	34572	58

Supplier	Advantage
Shanghai Daken Advanced Materials Co.,Ltd	58
ATK CHEMICAL COMPANY LIMITED	60
Win-Win Chemical CO., Limited	58
Hubei Jusheng Technology Co.,Ltd.	58
career henan chemical co	58
Hubei Co-Formula Material Tech Co., Ltd.	58
Shaanxi Dideu Medichem Co. Ltd	58
Fuxin Pharmaceutical	58
Antai Fine Chemical Technology Co.,Limited	58
Hefei TNJ Chemical Industry Co.,Ltd.	58

View Lastest Price from TRIS(DIMETHYLAMINO)SILANE manufacturers

Update time	Product	Price	Min. Order	Purity	Supply Ability	Manufacturer
2022-08-19	TRIS(DIMETHYLAMINO)SILANE 15112-89-7	US $1.10 / g	1g	99.00%	100 Tons Min	Dideu Industries Group Limited
2020-03-16	Tris(dimethyamino)silane 15112-89-7	US $1.00-0.00 / KG	1KG	98%	10000KG	Shaanxi Dideu Medichem Co. Ltd
2019-12-24	tris(dimethylamino)silane 15112-89-7	US $1.00 / KG	1KG	Min98% HPLC	g/kg/ton	Career Henan Chemical Co

TRIS(DIMETHYLAMINO)SILANE
15112-89-7
US $1.10 / g
99.00%
Dideu Industries Group Limited

Tris(dimethyamino)silane
15112-89-7
US $1.00-0.00 / KG
98%
Shaanxi Dideu Medichem Co. Ltd

tris(dimethylamino)silane
15112-89-7
US $1.00 / KG
Min98% HPLC
Career Henan Chemical Co

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TRIS(DIMETHYLAMINO)SILANE n,n,n’,n’,n’’,n’’-hexamethyl-silanetriamin n,n,n’,n’,n’’,n’’-hexamethylsilanetriamine N,N,N’,N’,N’’,N’’-hexamethyl-Silanetriamine TRIS(DIMETHYLAMINO)SILANE 99+% N,N',N''-(Silanetriyl)tris(dimethylamine) N,N',N''-Silanetriyltris(dimethylamine) TRIS(DIMETHYLAMINO)SILANE, 99.9+% Tris(diMethylaMino)silane, 99+%, 14-8750, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD (Me2N)3SiH TDMAS Tris(dimethylamido)silane Tris(dimethylamino)silane electronic grade, 99.999% Tris(dimethylamino)silane packaged for use in deposition systems Tris(dimethyamino)silane N,N,N',N',N'',N''-hexamethyl-Silanetriamine tris(Dimethylamino)silane n,n,n',n',n'',n''-hexamethylsilanetriamine n,n,n',n',n'',n''-hexamethyl-silanetriamin Silanetriamine,N,N,N',N',N'',N''-hexamethyl- Tri(dimethylamino)silane LS 1460 Tris(dimethylamino)silane, 99+% 3DMAS 3DMAS : [(CH3)2N]3SiH Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok cylinder (96-1070) for CVD/ALD 3DMAS Tris(dimethylamino)silane Liquid amino)siL Silanetriamine, N,N,N',N',N'',N''-hexamethyl- Tris(dimethylamino)silane 3DMAS TRIS(DIMETHYLAMINO)SILANE ISO 9001：2015 REACH DK087 15112-89-7 CH32N3SiH C6H19N3Si ALD Precursors organosilicon compounds