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Hexamethyldisilazane structure
Chemical Name:
Molecular Formula:
Formula Weight:
MOL File:

Hexamethyldisilazane Properties

Melting point:
-78 °C
Boiling point:
125 °C(lit.)
0.774 g/mL at 25 °C(lit.)
vapor pressure 
20 hPa (20 °C)
refractive index 
n20/D 1.407(lit.)
Flash point:
57.2 °F
storage temp. 
Miscible with acetone, benzene, ethyl ether, heptane and perchloroethylene.
30(at 25℃)
Specific Gravity
explosive limit
Water Solubility 
Moisture Sensitive
CAS DataBase Reference
999-97-3(CAS DataBase Reference)
NIST Chemistry Reference
Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-(999-97-3)
EPA Substance Registry System
Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)- (999-97-3)
  • Risk and Safety Statements
  • Hazard and Precautionary Statements (GHS)
  • NFPA
Hazard Codes  F,C,Xn
Risk Statements  11-20/21/22-34-52/53
Safety Statements  16-26-36/37/39-45-61
RIDADR  UN 3286 3/PG 2
WGK Germany  2
RTECS  JM9230000
Autoignition Temperature 325 °C
Hazard Note  Flammable
HS Code  2931 90 00
HazardClass  3
PackingGroup  II
Hazardous Substances Data 999-97-3(Hazardous Substances Data)
Toxicity LDLO i.p. in mice: 650 mg/kg (Petrarch Systems Inc. Product Information Sheets)
Signal word: Danger
Hazard statements:
Code Hazard statements Hazard class Category Signal word Pictogram P-Codes
H225 Highly Flammable liquid and vapour Flammable liquids Category 2 Danger P210,P233, P240, P241, P242, P243,P280, P303+ P361+P353, P370+P378,P403+P235, P501
H302 Harmful if swallowed Acute toxicity,oral Category 4 Warning P264, P270, P301+P312, P330, P501
H311 Toxic in contact with skin Acute toxicity,dermal Category 3 Danger P280, P302+P352, P312, P322, P361,P363, P405, P501
H314 Causes severe skin burns and eye damage Skin corrosion/irritation Category 1A, B, C Danger P260,P264, P280, P301+P330+ P331,P303+P361+P353, P363, P304+P340,P310, P321, P305+ P351+P338, P405,P501
H318 Causes serious eye damage Serious eye damage/eye irritation Category 1 Danger P280, P305+P351+P338, P310
H331 Toxic if inhaled Acute toxicity,inhalation Category 3 Danger P261, P271, P304+P340, P311, P321,P403+P233, P405, P501
H412 Harmful to aquatic life with long lasting effects Hazardous to the aquatic environment, long-term hazard Category 3 P273, P501
Precautionary statements:
P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking.
P261 Avoid breathing dust/fume/gas/mist/vapours/spray.
P273 Avoid release to the environment.
P280 Wear protective gloves/protective clothing/eye protection/face protection.
P303+P361+P353 IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower.
P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.
P405 Store locked up.

NFPA 704

Diamond Hazard Value Description
1 1
Health   1 Exposure would cause irritation with only minor residual injury (e.g. acetone, sodium bromate, potassium chloride)
Flammability   3 Liquids and solids (including finely divided suspended solids) that can be ignited under almost all ambient temperature conditions . Liquids having a flash point below 22.8 °C (73 °F) and having a boiling point at or above 37.8 °C (100 °F) or having a flash point between 22.8 and 37.8 °C (73 and 100 °F). (e.g. gasoline, acetone)
Instability   1 Normally stable, but can become unstable at elevated temperatures and pressures (e.g. propene)

(NFPA, 2010)

Hexamethyldisilazane price More Price(31)

Manufacturer Product number Product description CAS number Packaging Price Updated Buy
Sigma-Aldrich 379212 Hexamethyldisilazane ReagentPlus , 99.9% 999-97-3 25ml $40 2018-11-13 Buy
Sigma-Aldrich 33350-U HMDS, Derivatization Grade 999-97-3 u $52 2018-11-13 Buy
TCI Chemical H0089 1,1,1,3,3,3-Hexamethyldisilazane >96.0%(GC) 999-97-3 25mL $13 2018-11-22 Buy
TCI Chemical H0089 1,1,1,3,3,3-Hexamethyldisilazane >96.0%(GC) 999-97-3 100mL $29 2018-11-22 Buy
Alfa Aesar A15139 Hexamethyldisilazane, 98+% 999-97-3 100ml $27 2018-11-13 Buy

Hexamethyldisilazane Chemical Properties,Uses,Production


Hexamethyldisilazane(HMDS) is an extremely versatile and strong silylating agent. It is primarily used for the protection of sensitive functional groups during chemical synthesis.One of the advantages of Hexamethyldisilazane over chlorosilanes is that no base is needed as a hydrochloric acid acceptor. It produces ammonia which escapes easily from the reaction mixture during silylation.


Hexamethyldisilazane is a bulk organo silicon compound, being a quite useful silanizing agent. It is a reagent for the preparation of trimethylsilyl derivatives. It can be used for silanizing the surface of silicon water, cellulose. It can also be used to dehydrate cells of biomaterials for scanning electron microscopy (SEM). The hexamethyldisilazane coatings on various nanoparticles make them be resistant to water contamination and flocculation during synthesis. It can also be used as a modifier to control the shape, formation of agglomerates surface area and pore size of silica particles. Moreover, it is an adhesion promoter for photoresist in photolithography, and is also useful in the pyrolysis-gas chromatography-mass spectrometry to enhance the detectability of compounds with polar functional groups.

Chemical Properties

Colorless liquid


A reagent for the preparation of trimethylsilyl derivatives.


Deactivation of chromatographic support materials. In electronic industry as an adhesion promoter for photoresists on silicon.


Hexamethyldisilazane mainly used as methyl silane alkylation (such as amikacin, penicillin, cephalosporins and kinds of penicillin derivatives), hydroxyl protectants of antibiotics. It is used as surface treatment agent of diatomite, white carbon black, titanium and blond additives of photoresist in the semiconductor industry. It is used as treatment agent of tearing strength resistance. It is used as a solvent in organic synthesis and organometallic chemistry. It is used as an adhesion promoter for photoresist in photolithography. it is used for the preparation of trimethylsilyl ethers from hydroxy compounds. It is used as an alternative to critical point drying during sample preparation in electron microscopy. It is added to analyte to get silylated diagnostic products during pyrolysis in gas chromatography- mass spectrometry.


ChEBI: An N-silyl compound obtained from ammonia by replacement of two of the hydrogens with trimethylsilyl groups. Hexamethyldisilazane is a derivatisation agent used in gas chromatography mass spectrometry applications.

General Description

A liquid. Boiling point of 260°F. Flash point 77°F. May be toxic by ingestion. Irritates skin and eyes. Vapors are heavier than air. May emit highly toxic nitrogen oxide fumes when heated to decomposition. Used to make other chemicals.

Air & Water Reactions

Highly flammable. Moisture sensitive.

Reactivity Profile

Hexamethyldisilazane reacts with many carbonyl containing organic compounds to generate gaseous ammonia. May be incompatible with isocyanates, halogenated organics, peroxides, phenols (acidic), epoxides, anhydrides, and acid halides. Flammable gaseous hydrogen may be generated in combination with strong reducing agents, such as hydrides.


Flammable, moderate fire risk.

Health Hazard

Inhalation or contact with material may irritate or burn skin and eyes. Fire may produce irritating, corrosive and/or toxic gases. Vapors may cause dizziness or suffocation. Runoff from fire control or dilution water may cause pollution.

Purification Methods

A possible impurity is Me3SiCl. Wash it well with pet ether and fractionate it through a vacuum jacketed column packed with Helipac using a reflux ratio of 10:1. [Langer et al. J Org Chem 23 50 1958, Beilstein 4 IV 4014.]


Deng, Xiang. "Hexamethyldisilazane." Synlett 2011.06(2011):881-882. Chiavari, G, D. Fabbri, and S. Prati. "Gas chromatographic-mass spectrometric analysis of products arising from pyrolysis of amino acids in the presence of hexamethyldisilazane." Journal of Chromatography A922.1–2(2001):235-241.
Nation, J. L. "A new method using hexamethyldisilazane for preparation of soft insect tissues for scanning electron microscopy." Stain Technology 58.6(1983):347-51. lang=en®ion=US lang=en®ion=US lang=en®ion=US

Hexamethyldisilazane Preparation Products And Raw materials

Raw materials

Preparation Products

Hexamethyldisilazane Suppliers

Global( 405)Suppliers
Supplier Tel Fax Email Country ProdList Advantage
Jiangxi New jiayi New Materials Co., Ltd.
0792-3170903; CHINA 27 55
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0086 158 5814 5714 (Mobile; WhatsApp; Telegram)
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View Lastest Price from Hexamethyldisilazane manufacturers

Image Release date Product Price Min. Order Purity Supply Ability Manufacturer
2019-04-04 Hexamethyldisilazane
US $6.00 / kg 1kg High quality Professional Factory Ms Ella Chemwill Asia Co.,Ltd.
2018-08-07 Hexamethyldisilazane
US $1.00 / KG 1KG 99% Customized career henan chemical co

Hexamethyldisilazane Spectrum

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