二けい化タングステン 化学特性,用途語,生産方法
外観
黒灰色の粉末
溶解性
無機酸、水及びエタノールにほとんど溶けない。
用途
非酸化物系ニューセラミック材料，耐熱・耐酸化性材料。
化学的特性
Blue-gray, very hard solid. Insoluble in water; attacked by fused
alkalies and mixture of nitric and hydrofluoric acids.
使用
Tungsten silicide is used in microelectronics as a contact material. It is also used as a shunt over polysilicon lines to increase their conductivity and increase signal speed. Further, it acts as a barrier layer between silicon and other metals. In addition to this, it is used in microelectro mechanical systems and for oxidation-resistant coatings. It is also employed as a replacement for earlier tungsten films.
危険性
Dust flammable.
二けい化タングステン 上流と下流の製品情報
原材料
準備製品