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トリフルオロアミン

トリフルオロアミン 化学構造式
7783-54-2
CAS番号.
7783-54-2
化学名:
トリフルオロアミン
别名:
ペルフルオロアンモニア;三ふっ化窒素;ふっ化窒素;トリフルオロアンモニア;トリフルオロアミン;窒素トリフルオリド;三弗化窒素
英語化学名:
Nitrogen trifluoride
英語别名:
NF3;Trifluoramine;Trifluoroamine;Trifluorammonia;Trifluoroammonia;Perfluoroammonia;Nitrogen fluoride;NITROGEN TRIFLUORIDE;Stickstofftrifluorid;N,N,N-Trifluoroamine
CBNumber:
CB7152340
化学式:
F3N
分子量:
71
MOL File:
7783-54-2.mol

トリフルオロアミン 物理性質

融点 :
-207°C
沸点 :
-129°C
比重(密度) :
(liq at bp) 1.885
外見 :
colorless gas
水溶解度 :
insoluble
CAS データベース:
7783-54-2(CAS DataBase Reference)
NISTの化学物質情報:
Nitrogen trifluoride(7783-54-2)
EPAの化学物質情報:
Nitrogen fluoride (NF3)(7783-54-2)

安全性情報

主な危険性  O
Rフレーズ  8-20
Sフレーズ  17-23-38
RIDADR  2451
Hazard Note  Strong oxidising agent
国連危険物分類  2.2
HSコード  28129011
有毒物質データの 7783-54-2(Hazardous Substances Data)

トリフルオロアミン 価格

メーカー 製品番号 製品説明 CAS番号 包装 価格 更新時間 購入

トリフルオロアミン 化学特性,用途語,生産方法

用途

半導体化学でプラズマエッチング液フッ化水素レーザー

説明

Nitrogen trifluoride is a colorless gas with little odor. Nitrogen trifluoride is an oxidizer that is thennodynamically stable except at elevated temperatures. At temperatures up to about 482°F (250°C), its reactivity is comparable to oxygen. At higher temperatures, its reactivity is similar to fluorine owing to appreciable dissociation into NF2 and F-. The thennal dissociation of nitrogen trifluoride has been studied by a number of investigators and has been found to peak in the temperature range of 1100K to 1500K. In handling nitrogen trifluoride, conditions should be avoided that can result in high temperatures such as adiabatic compression from the rapid pressurization of a system.
Nitrogen trifluoride acts primarily upon the elements as a fluorinating agent, but not a very active one at lower temperatures. At elevated temperatures, nitrogen trifluoride pyrolyzes with many of the elements to produce nitrogen tetrafluoride and the corresponding fluoride. The pyrolysis of nitrogen trifluoride over copper turnings produces nitrogen tetrafluoride in a 62 percent to 71 percent yield at 707°F (375°C). Pyrolysis over carbon is more complete.

化学的特性

Nitrogen trifluoride is a colorless gas. Moldy odor. Shipped as a nonliquefied compressed gas.

化学的特性

harmful gas

使用

Oxidizer for high-energy fuels, chemical synthesis.

調製方法

Nitrogen trifluoride can be formed from a wide variety of chemical reactions. The commercial process for production involves direct fluorination of ammonia with fluorine gas in the presence ofammonium fluoride.

反応性

Hydrogen reacts with nitrogen trifluoride with the rapid liberation of large amounts of heat and is the basis for the use of nitrogen trifluoride in high-energy chemical lasers. The flammability range for nitrogen trifluoride-hydrogen mixtures is 9.4 mole percent to 95 mole percent nitrogen trifluoride. Nitrogen trifluoride reacts with organic compounds, but generally an elevated temperature is required to initiate the reaction. Under these conditions, the reaction will often proceed explosively, and great care must be exercised when exposing nitrogen trifluoride to organic compounds. Therefore, nitrogen trifluoride has found little use as a fluorinating agent for organic compounds.

一般的な説明

A colorless gas with a moldy odor. Very toxic by inhalation. Slightly soluble in water. Corrosive to tissue. Under prolonged exposure to fire or heat the containers may rupture violently and rocket. Used to make other chemicals and as a component of rocket fuels.

空気と水の反応

Slightly soluble in water.

反応プロフィール

Nitrogen trifluoride is a very powerful oxidizing agent. Presents dangerous fire hazard in the presence of reducing agents. Etches glass in the presence of moisture. Emits toxic and corrosive fumes of fluoride when heated to decomposition [Lewis, 3rd ed., 1993, p. 937]. Can react violently with hydrogen, ammonia, carbon monoxide, diborane, hydrogen sulfide, methane, tetrafluorohydrazine, charcoal. Explosive reaction with chlorine dioxide. A severe explosion may occur when exposed to reducing agents under pressure [Bretherick, 5th ed., 1995, p. 1427].

危険性

Severe explosion hazard. Corrosive to tissue. Methemoglobinemia, liver and kidney damage.

健康ハザード

Vapors may cause dizziness or asphyxiation without warning. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire may produce irritating and/or toxic gases.

火災危険

Substance does not burn but will support combustion. Some may react explosively with fuels. May ignite combustibles (wood, paper, oil, clothing, etc.). Vapors from liquefied gas are initially heavier than air and spread along ground. Runoff may create fire or explosion hazard. Containers may explode when heated. Ruptured cylinders may rocket.

工業用途

Nitrogen trifluoride has been used successfully in large quantities as a fluorine source for high-energy chemical lasers. It is preferred over fluorine because of its comparative ease of handling at ambient conditions.
Recently, an increasing amount of nitrogen trifluoride is being used in the semiconductor industry as a dry etchant, showing significantly higher etch rates and selectivities when compared to carbon tetrafluoride and mixtures of carbon tetrafluoride and oxygen.
Nitrogen trifluoride was also used as an oxidizer in rocketry in the early 1960s, but this application was not commercialized.

安全性プロファイル

A poison. Mildly toxic by inhalation. Prolonged absorption may cause mottling of teeth, skeletal changes. Severe explosion hazard by chemical reaction with reducing agents, particularly when under pressure. A very dangerous fire hazard; a very powerful oxidner; otherwise inert at normal temperatures and pressures.

職業ばく露

This material has been used in chemical synthesis and as an oxidizer for high-energy fuels (as an oxidizer in rocket propellant combinations).

貯蔵

Nitrogen trifluoride cylinders must be securely supported while in use to prevent movement and straining of connections. Full cylinders must be stored in a well-ventilated area, protected from excessive heat (125°F or 51.7°C), located away from organic or flammable materials, and secured. Valve protection caps and valve outlet caps must be securely in place at all times when the cylinder is not in use.

輸送方法

UN2451 Nitrogen trifluoride, Hazard Class: 2.2; Labels: 2.2-Nonflammable compressed gas; 5.1-Oxidizer. Cylinders must be transported in a secure upright position, in a well-ventilated truck. Protect cylinder and labels from physical damage. The owner of the compressed gas cylinder is the only entity allowed by federal law (49CFR) to transport and refill them. It is a violation of transportation regulations to refill compressed gas cylinders without the express written permission of the owner.

Toxicity evaluation

The toxicity of nitrogen trifluoride is related to its capacity to fonn methemoglobin, a modified fonn of hemoglobin incapable of oxygen transport, and to destroy red blood cells (hemolysis). Upon cessation of exposure, methemoglobin spontaneously reverts to hemoglobin. However, at high levels of exposure, therapeutic intervention may be necessary (oxygen, methylene blue, exchange transfusion). The occurrence of hemolysis requires careful monitoring for degree of anemia and the potential for impaired kidney function.

不和合性

The gas is a powerful oxidizer. Presents dangerous fire hazard in the presence of reducing agents. Etches glass in the presence of moisture. Reacts with oil, grease, reducing agents and other oxidizable materials; combustibles, organics, ammonia, carbon monoxide; methane, hydrogen, hydrogen sulfide; activated charcoal; diborane, water. Can react violently with hydrogen, ammonia, carbon monoxide, diborane, hydrogen sulfide, methane, tetrafluorohydrazine, charcoal. Nitrogen trifluoride will increase intensity of an existing fire.

廃棄物の処理

Return refillable compressed gas cylinders to supplier. Vent into large volume of concentrated reducing agent (bisulfites, ferrous salts or hypo) solution, then neutralize and flush to sewer with large volumes of water.

トリフルオロアミン 上流と下流の製品情報

原材料

準備製品


トリフルオロアミン 生産企業

Global( 41)Suppliers
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86-411-84821380 sales@richfortunechem.com China 360 57
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Henan Tianfu Chemical Co.,Ltd. 0371-55170693/55170694/55170695/55170691
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7783-54-2(トリフルオロアミン)キーワード:


  • 7783-54-2
  • N,N,N-Trifluoroamine
  • NF3
  • Nitrogen fluoride (NF3)
  • nitrogenfluoride(nf3)
  • Perfluoroammonia
  • Stickstoff(III)-fluorid
  • Stickstofftrifluorid
  • Trifluoroamine
  • Trifluoroammonia
  • NITROGEN TRIFLUORIDE
  • Nitrogen fluoride
  • Trifluoramine
  • Nitrogen trifluoride 99%
  • Nitrogentrifluoride99%
  • NITROGEN TRIFLUORIDE: 99.99%
  • Trifluorammonia
  • Nitrogen Trifluoride (NF3)
  • ペルフルオロアンモニア
  • 三ふっ化窒素
  • ふっ化窒素
  • トリフルオロアンモニア
  • トリフルオロアミン
  • 窒素トリフルオリド
  • 三弗化窒素
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