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| TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Basic information |
Product Name: | TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM | Synonyms: | TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM;ZIRCONIUM TETRAKIS(ETHYLMETHYLAMIDE);Tetrakis(ethyl Methyl amido) zirconium;tetrakis(ethylmethylamido)zirconium(iv);tetrakis(ethylmethylamino)zirconium(iv);Tetrakis(ethylmethylamino)zirconium(IV) 99%, 40-1710, contained in 50 ml Swagelok cylinder for CVD/ALD;Tetrakis(ethylmethylamido)zirconium(IV), 99% TEMAZ, 40-1710, contained in 50 ml Swagelok cylinder for CVD/ALD;Tetrakis(ethylmethylamino)zirconium 99.999% | CAS: | 175923-04-3 | MF: | C12H32N4Zr | MW: | 323.63 | EINECS: | | Product Categories: | ALD Precursors;metal amide complex | Mol File: | 175923-04-3.mol | |
| TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Chemical Properties |
Boiling point | 81 °C0.1 mm Hg(lit.) | density | 1.049 g/mL at 25 °C(lit.) | Fp | 50 °F | form | liquid | color | light yellow | Specific Gravity | 1.049 | Sensitive | Air & Moisture Sensitive | Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
| TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Usage And Synthesis |
| TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Preparation Products And Raw materials |
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