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Product Name:TRIETHYLPHOSPHINE(6,6,7,7,8,8,8-HEPTAFLUORO-2,2-DIMETHYL-3,5-OCTANEDIONATE)SILVER(I)
Synonyms:Triethylphosphine(6,6,7,7,8,8,8-heptafluoro-2,2-diMethyl-3,5-octanedionate)silver(I),Min.98%;TRIETHYLPHOSPHINE(6,6,7,7,8,8,8-HEPTAFLUORO-2,2-DIMETHYL-3,5-OCTANEDIONATE)SILVER(I);Triethylphosphine(6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedionate)
silver(I), min. 98%;(Z)-1,1,1,2,2,3,3-heptafluoro-6-hydroxy-7,7-dimethyloct-5-en-4-one:silver:triethylphosphane;-3,5-octanedionate)siL;phosphine(6,6,7,7,8,8,8-heptafL;Triethylphosphine(6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedionate)silver;Ag(fod)(PEt3)(Ag(fod)(PEt3))
CAS:165461-74-5
MF:C10H10AgF7O2.C6H15P
MW:521.201
EINECS:
Mol File:165461-74-5.mol
165461-74-5

Use

Triethylphosphine(6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedionate)silver(I) is the precursor for the chemical vapor deposition of silver films. Together with plasma-activated hydrogen, useful starting material for the atomic layer deposition of silver thin films at growth temperatures of 120-150°C.

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