ChemicalBook--->CAS DataBase List--->12067-57-1

12067-57-1

12067-57-1 Structure

12067-57-1 Structure
IdentificationBack Directory
[Name]

TITANIUM SILICIDE
[CAS]

12067-57-1
[Synonyms]

silicon:titanium
TITANIUM SILICIDE
pentatitanium trisilicide
Titanium silicide, ti5si3
Cadmium Telluride (CdTe) Sputtering Targets
[EINECS(EC#)]

235-082-9
[Molecular Formula]

Si3Ti5
[MDL Number]

MFCD01310208
[MOL File]

12067-57-1.mol
[Molecular Weight]

323.59
Chemical PropertiesBack Directory
[Melting point ]

2130°C
[density ]

4.3 g/cm3
[form ]

-325 Mesh Powder
[Resistivity]

55 (ρ/μΩ.cm)
[Water Solubility ]

Soluble in hydrofluoric acid. Insoluble in water.
[Crystal Structure]

Hexagonal
[EPA Substance Registry System]

Titanium silicide (Ti5Si3) (12067-57-1)
Hazard InformationBack Directory
[Chemical Properties]

-325 mesh gray powder(s) [AES93]
[Uses]

It is used as source, gate and drain contacts and local interconnections in CMOS integrated circuits. it is used in the C54 phase.
Safety DataBack Directory
[Symbol(GHS) ]


GHS02,GHS07
[Hazard statements ]

H228-H315-H319-H335
[Precautionary statements ]

P210-P261-P280-P305+P351+P338-P405-P501a
[RIDADR ]

UN3178
[TSCA ]

Yes
[HazardClass ]

4.1
[PackingGroup ]

III
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