33271-88-4

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33271-88-4 Structure

Identification	Back Directory
[Name] CpZr(NMe2)3 CpTDMAZ
[CAS] 33271-88-4
[Synonyms] CPTDMAZ2 CpZr(NMe2)3 CpTDMAZ Tris(dimethylamino)cyclopentadienylzirconium Cyclopentadienyl Tris(dimethylamino) Zirconium (cyclopentadienyl)zirconium tris(dimethylamide)
[Molecular Formula] C11H18N3Zr
[MOL File] 33271-88-4.mol
[Molecular Weight] 283.51

Questions And Answer	Back Directory
[Uses] Cyclopentadienyltris(dimethylamino)zirconium can be used in CVD or ALD techniques to prepare zirconium oxide thin films.

Chemical Properties	Back Directory
[InChI] InChI=1S/C5.3C2H6N.Zr/c1-2-4-5-3-1;31-3-2;/h;31-2H3;/q4*-1;+4
[InChIKey] GFKLJJIJUMPRTB-UHFFFAOYSA-N
[SMILES] [N-]([Zr+4]1234(C5=C1C2=C3[C-]45)([N-](C)C)[N-](C)C)(C)C
[EPA Substance Registry System] Zirconium, (.eta.5-2,4-cyclopentadien-1-yl)tris(N-methylmethanaminato)- (33271-88-4)

Safety Data	Back Directory
[Symbol(GHS) ] GHS02,GHS07,GHS08,GHS05
[Signal word ] Danger
[Hazard statements ] H334-H226-H317-H302-H332-H312-H260-H314
[Precautionary statements ] P280-P302+P352-P312-P322-P363-P501-P260-P264-P280-P301+P330+P331-P303+P361+P353-P363-P304+P340-P310-P321-P305+P351+P338-P405-P501-P261-P285-P304+P341-P342+P311-P501-P223-P231+P232-P280-P335+P334-P370+P378-P402+P404-P501-P264-P270-P301+P312-P330-P501-P261-P271-P304+P340-P312-P261-P272-P280-P302+P352-P333+P313-P321-P363-P501
[TSCA ] TSCA listed

Hazard Information	Back Directory
[Chemical Properties] Cyclopentadienyltris(dimethylamino)zirconium is a liquid at room temperature, a very sensitive compound to air and water vapor, soluble in organic solvents such as hydrocarbons, carbon tetrachloride, etc. It not only has good stability and high vapor pressure, but also exhibits considerable reactivity.

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