169896-41-7 Basic information More..
Product Name:TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE
Synonyms:(TERT-BUTYLIMINO)TRIS(DIETHYLAMINO)TANTALUM;TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE;TRIS(DIETHYLAMIDO)(TERT-BUTYLIMIDO)TANTALUM(V);TRIS(DIETHYLAMINO)(T-BUTYLIMINO)TANTALUM;TRIS(DIETHYLAMINO)-TERT-BUTYLAMIDO TANTALUM;TRIS(DIETHYLAMINO)(TERT-BUTYLIMINO)TANTALUM(V);TRIS(DIETHYLAMIDO)(TERT-BUTYLIMIDO)TANT&;TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE, 99.99% (METALS
CAS:169896-41-7
MF:C16H39N4Ta
MW:468.46
EINECS:624-910-8
Mol File:169896-41-7.mol
169896-41-7

Use

Tantalum tris(diethylamido)-tert-butylimide is a useful precursor for the atomic layer deposition of tantalum oxide and tantalum nitride.

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