| 76-16-4 Basic information More.. |
Product Name: | Hexafluoroethane | Synonyms: | freon116;Hexafluorethan;hexafluoro-ethan;Perfluorocarbon116;PFC116;R 116;r116;R-116 | CAS: | 76-16-4 | MF: | C2F6 | MW: | 138.01 | EINECS: | 200-939-8 | Mol File: | 76-16-4.mol | |
Use
Hexafluoroethane is used as a versatile etchant in semiconductor manufacturing. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon.
- HEXAFLUOROETHANE
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- US $1.00 / kg
- 2019-07-06
- CAS:76-16-4
- Min. Order: 1 g
- Purity: 99%
- Supply Ability: 100KG
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76-16-4
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