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| Product Name: | TETRAKIS(DIETHYLAMINO)TITANIUM | | Synonyms: | TDEAT;TETRAKIS (DIETHYLAMIDO) TITANIUM;TETRAKIS(DIETHYLAMINO)TITANIUM;TETRAKIS DIETHYL AMINO TITANIUM (IV);TITANIUM (IV) DIETHYLAMIDE;TITANIUM TETRAKIS(DIETHYLAMIDE);Titanium, tetrakis(diethylamino)-;TETRAKIS(DIETHYLAMINO)TITANIUM, 99.999% | | CAS: | 4419-47-0 | | MF: | C16H40N4Ti | | MW: | 336.38 | | EINECS: | | | Product Categories: | metal amide complex | | Mol File: | 4419-47-0.mol |  |
| | TETRAKIS(DIETHYLAMINO)TITANIUM Chemical Properties |
| | TETRAKIS(DIETHYLAMINO)TITANIUM Usage And Synthesis |
| Description | Tetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.
| | Reference |
- Kim, Ju Youn, et al. "Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method." Japanese Journal of Applied Physics 42.7A (2003):4245-4248.
- Katamreddy, Rajesh, et al. "Ti source precursors for atomic layer deposition of TiO2, STO and BST." Ecs Transactions 16.4(2008):660-71.
- Shoemaker, Erika Leigh, et al. "Process for reactive ion etching a layer of diamond like carbon." US, US8409458. 2013.
| | Chemical Properties | Clear dark red liquid | | Uses | Precursors Packaged for Depositions Systems | | General Description | Atomic number of base material: 22 Titanium | | Purification Methods | Dissolve it in *C6H6, filter if a solid separates, evaporate under reduced pressure and distil it. It is an orange liquid which reacts violently with alcohols. [Bradley et al. J Chem Soc 3857 1960, Beilstein 4 IV 313.] |
| | TETRAKIS(DIETHYLAMINO)TITANIUM Preparation Products And Raw materials |
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