|
| TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Basic information |
Product Name: | TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM | Synonyms: | Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) PURATREM;Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) PURATREM, packed in 50 ml Swagelok cylinder for CVD/ALD;Tetrakis(ethylmethylamino)hafnium 99.999%;Tetrakis(ethylMethylaMino)hafniuM, 99% (99.99+%-Hf, <0.15% Zr) PURATREM, 72-7720, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD;Tetrakis(ethylMethylaMido)hafniuM(IV) >=99.99% trace Metals basis;Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH;TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM;Tetrakis(ethylmethylamido)hafnium(IV), 99.99+% | CAS: | 352535-01-4 | MF: | C12H32HfN4 | MW: | 410.9 | EINECS: | | Product Categories: | ALD Precursors;metal amide complex | Mol File: | 352535-01-4.mol | |
| TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Chemical Properties |
Melting point | <-50 °C | Boiling point | 79 °C0.1 mm Hg(lit.) | density | 1.324 g/mL at 25 °C(lit.) | Fp | 52 °F | storage temp. | 2-8°C | form | liquid | color | colorless to yellow | Specific Gravity | 1.324 | Hydrolytic Sensitivity | 9: reacts extremely rapidly with atmospheric moisture - may be pyrophoric - glove box or sealed system required | Sensitive | Air & Moisture Sensitive | EPA Substance Registry System | Ethanamine, N-methyl-, hafnium(4+) salt (4:1) (352535-01-4) |
Hazard Codes | F,Xi | Risk Statements | 11-14-36/37/38 | Safety Statements | 16-26-36 | RIDADR | UN 3398 4.3/PG 2 | WGK Germany | 3 | TSCA | No | HazardClass | 4.3 | PackingGroup | II | HS Code | 2921199990 |
| TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Usage And Synthesis |
| TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Preparation Products And Raw materials |
|