헥사플루오르화 텅스텐 C화학적 특성, 용도, 생산
화학적 성질
Tungsten hexafluoride is a toxic, colorless gas
or a light yellow liquid.
용도
In the electronics industry as a source of tungsten metal that connects the aluminum layers within semiconductor devices.
일반 설명
A toxic corrosive light yellow liquid or gas. Boiling point 67°F. Melting point 37°F. Noncombustible. Used in the manufacture of other chemicals and in the manufacture of electronics.
공기와 물의 반응
Decomposes in water giving hydrofluoric acid, another corrosive material.
반응 프로필
Tungsten hexafluoride emits very toxic and irritating fumes containing metallic tungsten and tungsten fluorides when heated to decomposition. Reacts violently with tetramethoxysilane [Jacob, E., Angew. Chem., 1982, 21, p. 143].
건강위험
TOXIC; may be fatal if inhaled, ingested or absorbed through skin. Vapors are extremely irritating and corrosive. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire will produce irritating, corrosive and/or toxic gases. Runoff from fire control may cause pollution.
화재위험
Some may burn but none ignite readily. Vapors from liquefied gas are initially heavier than air and spread along ground. Some of these materials may react violently with water. Cylinders exposed to fire may vent and release toxic and/or corrosive gas through pressure relief devices. Containers may explode when heated. Ruptured cylinders may rocket.
Safety Profile
A poison and corrosive
liquid or gas.
잠재적 노출
A strong halogenating agent. Used to
apply tungsten coatings to other surfaces by vapor deposition
process; making electronics and components; in the
manufacture of other chemicals.
운송 방법
UN2196 Tungsten hexafluoride, Hazard Class:
2.3; Labels: 2.3-Poisonous gas, 8-Corrosive material,
Inhalation Hazard Zone B. Cylinders must be transported
in a secure upright position, in a well-ventilated truck.
Protect cylinder and labels from physical damage. The
owner of the compressed gas cylinder is the only entity
allowed by federal law (49CFR) to transport and refill
them. It is a violation of transportation regulations to refill
compressed gas cylinders without the express written permission
of the owner.
비 호환성
Decomposes on contact with water and
moist air, forming highly corrosive hydrofluoric acid.
Violent reaction on contact with methyl silicate.
폐기물 처리
Return refillable compressed
gas cylinders to supplier. Nonrefillable cylinders should be
disposed of in accordance with local, state and federal regulations.
Allow remaining gas to vent slowly into atmosphere
in an unconfined area or exhaust hood. Refillabletype
cylinders should be returned to original supplier with
any valve caps and outlet plugs secured and valve protection
caps in place.
헥사플루오르화 텅스텐 준비 용품 및 원자재
원자재
준비 용품
