308103-54-0

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308103-54-0 Structure

Identification	Back Directory
[Name] TETRAKIS(ETHYLMETHYLAMINO)TITANIUM
[CAS] 308103-54-0
[Synonyms] TEMAT TETRAKIS(ETHYLMETHYLAMINO)TITANIUM TITANIUM TETRAKIS(ETHYLMETHYLAMIDE) tetrakis(ethylmethylamido)titanium(iv) tetrakis(ethylmethylamino)titanium(iv) TETRAKIS(ETHYLMETHYLAMINO)TITANIUM, 99.9 TEMAT: Tetrakis(ethylmethylamino)titanium TITANIUM TETRAKIS(ETHYLMETHYLAMIDE), 99+% TETRAKIS(ETHYLMETHYLAMINO)TITANIUM,99%(99.99%-TI)PURATREM Tetrakis(ethylMethylaMido)titaniuM(IV) electronic grade, >=99.99%
[Molecular Formula] C12H32N4Ti
[MDL Number] MFCD00799591
[MOL File] 308103-54-0.mol
[Molecular Weight] 280.28

Chemical Properties	Back Directory
[Boiling point ] 80 °C/0.1 mmHg (lit.)
[density ] 0.923 g/mL at 25 °C (lit.)
[Fp ] 36 °F
[storage temp. ] 2-8°C
[form ] liquid
[color ] yellow to orange
[Specific Gravity] 0.923
[Hydrolytic Sensitivity] 8: reacts rapidly with moisture, water, protic solvents
[Sensitive ] moisture sensitive
[InChI] 1S/4C3H8N.Ti/c41-3-4-2;/h43H2,1-2H3;/q4*-1;+4
[InChIKey] LNKYFCABELSPAN-UHFFFAOYSA-N
[SMILES] CCN(C)[Ti](N(C)CC)(N(C)CC)N(C)CC

Safety Data	Back Directory
[Hazard Codes ] F,C
[Risk Statements ] 11-14-34
[Safety Statements ] 16-26-36/37/39-43-45
[RIDADR ] UN 3398 4.3/PG 1
[WGK Germany ] 3
[TSCA ] No
[Storage Class] 4.3 - Hazardous materials which set free flammable gases upon contact with water
[Hazard Classifications] Flam. Liq. 2 Skin Corr. 1B Water-react 1

Hazard Information	Back Directory
[Uses] Precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD).
[General Description] Atomic number of base material: 22 Titanium
[reaction suitability] core: titanium

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