| Identification | More | [Name]
TETRAKIS(DIETHYLAMINO)TITANIUM | [CAS]
4419-47-0 | [Synonyms]
TDEAT
TETRAKIS (DIETHYLAMIDO) TITANIUM
TETRAKIS(DIETHYLAMINO)TITANIUM
TETRAKIS DIETHYL AMINO TITANIUM (IV)
TITANIUM (IV) DIETHYLAMIDE
TITANIUM TETRAKIS(DIETHYLAMIDE)
Titanium, tetrakis(diethylamino)-
TETRAKIS(DIETHYLAMINO)TITANIUM, 99.999%
TETRAKIS(DIETHYLAMINO)TITANIUM, TECH.
Tetrakis(diethylamino)titanium,99.99%(metalsbasis)
Tetrakis(diethylamino)titanium,99%
Ethanamine, N-ethyl-, titanium(4+) salt
tetrakis(diethylamido)titanium(iv)
titanium diethylamide
Tetrakis(diethylamino)titanium(IV), Titanium(IV) tetrakis(diethylamide) | [Molecular Formula]
C16H40N4Ti | [MDL Number]
MFCD00015648 | [Molecular Weight]
336.38 | [MOL File]
4419-47-0.mol |
| Chemical Properties | Back Directory | [Appearance]
Clear dark red liquid | [Melting point ]
4 °C | [Boiling point ]
112 °C0.1 mm Hg(lit.) | [density ]
0.931 g/mL at 25 °C(lit.)
| [refractive index ]
n20/D 1.536(lit.)
| [Fp ]
-18 °F
| [storage temp. ]
Flammables area | [solubility ]
Reacts with air. | [form ]
liquid | [color ]
yellow to orange | [Specific Gravity]
0.95 | [Hydrolytic Sensitivity]
8: reacts rapidly with moisture, water, protic solvents | [Sensitive ]
Moisture Sensitive | [BRN ]
3621431 | [InChI]
1S/4C4H10N.Ti/c4*1-3-5-4-2;/h4*3-4H2,1-2H3;/q4*-1;+4 | [InChIKey]
VJDVOZLYDLHLSM-UHFFFAOYSA-N | [SMILES]
CCN(CC)[Ti](N(CC)CC)(N(CC)CC)N(CC)CC | [CAS DataBase Reference]
4419-47-0(CAS DataBase Reference) | [NIST Chemistry Reference]
Tetrakis(diethylamino)titanium(4419-47-0) | [EPA Substance Registry System]
4419-47-0(EPA Substance) |
| Safety Data | Back Directory | [Hazard Codes ]
F,C,Xi | [Risk Statements ]
R11:Highly Flammable.
R14/15:Reacts violently with water, liberating extremely flammable gases .
R34:Causes burns.
R36/37/38:Irritating to eyes, respiratory system and skin . | [Safety Statements ]
S26:In case of contact with eyes, rinse immediately with plenty of water and seek medical advice .
S36/37/39:Wear suitable protective clothing, gloves and eye/face protection .
S43:In case of fire, use ... (indicate in the space the precise type of fire-fighting equipment. If water increases the risk add-Never use water) .
S45:In case of accident or if you feel unwell, seek medical advice immediately (show label where possible) .
S37/39:Wear suitable gloves and eye/face protection .
S16:Keep away from sources of ignition-No smoking . | [RIDADR ]
UN 3398 4.3/PG 1
| [WGK Germany ]
3
| [F ]
10-21 | [TSCA ]
Yes | [HazardClass ]
4.3 | [PackingGroup ]
II | [HS Code ]
29310099 | [Storage Class]
4.3 - Hazardous materials which set free flammable gases upon contact with water | [Hazard Classifications]
Flam. Liq. 2
Skin Corr. 1B
Water-react 1 |
| Questions And Answer | Back Directory | [Description]
Tetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.
| [Reference]
- Kim, Ju Youn, et al. "Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method." Japanese Journal of Applied Physics 42.7A (2003):4245-4248.
- Katamreddy, Rajesh, et al. "Ti source precursors for atomic layer deposition of TiO2, STO and BST." Ecs Transactions 16.4(2008):660-71.
- Shoemaker, Erika Leigh, et al. "Process for reactive ion etching a layer of diamond like carbon." US, US8409458. 2013.
|
| Hazard Information | Back Directory | [Chemical Properties]
Clear dark red liquid | [Uses]
| [General Description]
Atomic number of base material: 22 Titanium | [reaction suitability]
core: titanium
reagent type: catalyst | [Purification Methods]
Dissolve it in *C6H6, filter if a solid separates, evaporate under reduced pressure and distil it. It is an orange liquid which reacts violently with alcohols. [Bradley et al. J Chem Soc 3857 1960, Beilstein 4 IV 313.] |
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