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Product Name:Bis(dimethylamino)dimethylsilane
Synonyms:Bis(dimethylamino)dimethylsilane,96%;BIS(DIMETHYLAMINO)DIMETHYLSILANE;BIS(DIMETHYLAMINO)DIMETHYSILANE;BIS(DIMETHYLAMINO)DIMETHYLSILANE 96%;bis-(n,n-diethylamino)-dimethylsilane;Dimethylbis[dimethylamino]silane;hexamethyl-silanediamin;hexamethyl-Silanediamine
CAS:3768-58-9
MF:C6H18N2Si
MW:146.31
EINECS:223-200-1
Mol File:3768-58-9.mol
3768-58-9

Use

Bis(dimethylamino)dimethylsilane is used in the chemical vapor deposition of silicon nitride films, and also the atomic layer deposition of SiNxCy dielectric sealing layers using plasma-enhanced atomic layer deposition (PE-ALD). It is also used as a reagent for silylation.

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CAS:3768-58-9
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Products Intro: Product Name:Bis(dimethylamino)dimethylsilane BDMADMS
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Purity:0.97 Package:mgs,gs,kgs Remarks:A851772
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