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Physical and chemical properties Trichlorosilane Toxicity Chemical properties Uses Production method Category Toxicity grading Acute oral toxicity Flammability hazard characteristics Storage characteristics Extinguishing agent
Trichlorosilane structure
Chemical Name:
silanea-19;trichlorsilan;triclorosilano;TRICHLOROSILANE;trichloorsilaan;trichloro-silan;Silicochloroform;Silane, trichloro;silicon chloroform;siliciumchloroform
Molecular Formula:
Formula Weight:
MOL File:

Trichlorosilane Properties

Melting point:
-127 °C
Boiling point:
32-34 °C(lit.)
1.342 g/mL at 25 °C(lit.)
vapor density 
1 (vs air)
vapor pressure 
9.75 psi ( 20 °C)
refractive index 
Flash point:
7 °F
storage temp. 
Soluble in benzene, ether, heptane, chloroform and carbon tetrachloride.
Specific Gravity
Sharp, choking, like hydrochloric acid.
explosive limit
Water Solubility 
Air & Moisture Sensitive
Stable, but extremely flammable. Pyrophoric - spontaneously ignites in air. Explosion hazard in air - note wide explosion limits. Reacts violently with water. Incompatible with moisture, acids, bases, strong oxidizing agents, alcohols, amines.
CAS DataBase Reference
10025-78-2(CAS DataBase Reference)
NIST Chemistry Reference
EPA Substance Registry System
Silane, trichloro-(10025-78-2)
  • Risk and Safety Statements
Signal word  Danger
Hazard statements  H224-H250-H302-H314-H331-H335-H332
Precautionary statements  P303+P361+P353-P305+P351+P338-P405-P422a-P501a-P210-P231-P280-P305+P351+P338+P310-P370+P378-P422
Hazard Codes  F+,C
Risk Statements  12-14-17-20/22-29-35
Safety Statements  16-26-36/37/39-43-45-7/9-43A
RIDADR  UN 1295 4.3/PG 1
WGK Germany  1
RTECS  VV5950000
HazardClass  4.3
PackingGroup  I
HS Code  28530090
Toxicity LD50 orally in rats: 1.03 g/kg (Smyth)

NFPA 704

Diamond Hazard Value Description
3 2
Health   3 Short exposure could cause serious temporary or moderate residual injury (e.g. liquid hydrogen, sulfuric acid, calcium hypochlorite, hexafluorosilicic acid)
Flammability   4 Will rapidly or completely vaporize at normal atmospheric pressure and temperature, or is readily dispersed in air and will burn readily. Includes pyrophoric substances. Flash point below room temperature at 22.8 °C (73 °F). (e.g. acetylene, propane, hydrogen gas)
Instability   2 Undergoes violent chemical change at elevated temperatures and pressures, reacts violently with water, or may form explosive mixtures with water (e.g. white phosphorus, potassium, sodium)
Special   W

(NFPA, 2010)

Trichlorosilane price More Price(6)

Manufacturer Product number Product description CAS number Packaging Price Updated Buy
Sigma-Aldrich 175552 Trichlorosilane 99% 10025-78-2 5g $26.8 2018-11-20 Buy
Sigma-Aldrich 175552 Trichlorosilane 99% 10025-78-2 100g $46.7 2018-11-20 Buy
Alfa Aesar 014078 Trichlorosilane 98% 10025-78-2 100g $43.6 2018-11-20 Buy
Alfa Aesar 014078 Trichlorosilane 98% 10025-78-2 25g $20 2018-11-20 Buy
Sigma-Aldrich 175552 Trichlorosilane 99% 10025-78-2 500g $108 2018-11-20 Buy

Trichlorosilane Chemical Properties,Uses,Production

Physical and chemical properties

Trichlorosilane is pungent stench flowable volatile colorless liquid at room temperature and pressure. It is highly flammable in air, it also has the risk of fire at below-18 ℃, when meets open fire, it burns strongly with red flames and white smoke, and SiO2, HCl and Cl2 can generate: SiHCl3 + O2 → SiO2 + HCl + Cl2; the vapor of three chlorosilane and air can form a wide range of concentrations of explosive gas mixture, and it can cause violent explosion when be heated. The thermal stability is better than dichlorosilane, it can decompose into toxic fumes chloride (HCl), Cl2 and Si at 900℃. When meets moisture, it can generate smoke, it can react violently with water: 2SiHCl3 + 3H2O → (HSiO) 2O + 6HCl; It can decompose in lye and release hydrogen: SiHCl3 + 3NaOH + H2O → Si (OH) 4 + 3NaCl + H2; and when it contacts oxidative substances, explosive reaction can occur. The reaction with acetylene, hydrocarbons and other organic hydrocarbons can produce chlorosilane: SiHCl3 + CH≡CH → CH2CHSiCl3, SiHCl3 + CH2 = CH2 → CH3CH2SiCl3; In the presence of lithium aluminum hydride, lithium borohydride, SiHCl3 can be reduced to silane. When the container is subjected to strong shock, liquid SiHCl3 will fire. It is soluble in benzene, ether etc.. Anhydrous trichlorosilane can not corrode iron and stainless steel, but in the presence of moisture, it can corrode most metals.


Trichlorosilane is also known as trichlorosilane, silicon chloroform, it can be used the raw material of polymer organic silicon compound.
Trichlorosilane is not only the important intermediate of manufacturing silane coupling agent, and other organic silicon products, but also the major raw material to manufacture polysilicon. Silane coupling agent is an important, high-tech, high value-added silicone composite material, the non-crosslinked resin can crosslink or modify by silane coupling agent, so it is increasingly and widely used in glass fiber, foundry, tires rubber and other industries. Silicon tetrachloride which is the major byproduct in the production of trichlorosilane is also the main raw material of silicone, the manufactures contain silicon ester, silicone oil, high temperature insulation paint, silicone resin, silicone rubber and heat-resistant padded material . High-purity silicon tetrachloride or high-purity silica is important raw material in manufacturing of inorganic silicon compounds, quartz fibers and optical fiber.
The main purpose of the polysilicon product:
1. It can be made into solar cell, the radiant energy can be turned into electrical energy; 2. high purity crystalline silicon is an important semiconductor material; 3. it is important material in cermet, Astronautical; 4. it can be used in optical fiber communication which is recent modern communication means; 5. it can be used in excellent properties of the organosilicon compounds.
The above information is edited by the chemicalbook of Wang Xiaodong.


After several minutes of inhaling trichlorosilane vapor, people show excitement, breathing reflex disorders, respiratory inflammation. When spills on the skin, it can cause necrosis, long-term healing of ulcers. Maximum allowable concentration is 1 mg/m3 (must test HCl). Production staff should wear closed-type overalls, protective masks, sealed glasses, latex gloves and other protective clothing to prevent direct contact with the respiratory organs, eyes and skin. Production equipment must be sealed, workshop should be ventilated. After work, people should take a shower, and aobserve personal hygiene. Production workers should have pre-employment and periodic medical examinations.

Chemical properties

It is colorless liquid. It is soluble in carbon disulfide, carbon tetrachloride, chloroform, benzene etc.


It can be used the raw material for polymer organic silicon compound, it can also be used in industrial instrumentation.
It can be used the raw material for producing organic silicon compound, it is also the basic raw material of production polysilicon.

Production method

The method of boiling chlorination
Silicon powder after dried is added into boiling chloride furnace, and reacts with dry hydrogen chloride gas which passes into the furnace of at 340 ℃. The generated crude trichlorosilane goes through the wet dust collector, condenser tube and comes into distillation column to separate silicon tetrachloride, trichlorosilane gas from the distillation column is condensed to obtain finished trichlorosilane.
Si + 3HCl → SiHCl3 + H2


Flammable liquid.

Toxicity grading

Mid toxicity.

Acute oral toxicity

rat LD50: 1030 mg/kg; Inhalation-Mouse LC50: 1500 mg/m/2 hours.

Flammability hazard characteristics

It is flammable in case of fire, high temperature, oxidant; it can generate toxic fumes of chlorides and fluorides in case of water or high temperature.

Storage characteristics

Treasury should be ventilated and low-temperature dried; it should be stored separately with oxidants, acids.

Extinguishing agent

Dry powder, dry sand, carbon dioxide, foam.

Chemical Properties

Clear liquid with acrid odor of hydrogen chloride


In organic synthesis.

General Description

A colorless fuming liquid with a pungent odor. Flash point 7°F. Vapor and liquid cause burns. More dense than water. Vapors are heavier than air.

Air & Water Reactions

Highly flammable. Ignites spontaneously in air [NFPA, 1991]. Reacts violently with water, steam, moisture in air to generate heat and flammable (H2) and corrosive (HCl) gases. [Handling Chemicals Safely 1980. p. 924].

Reactivity Profile

Trichlorosilane reacts with alcohols, acetone, light metals with generation of heat and combustible (H2) and corrosive (HCl) gases [Handling Chemicals Safely 1980. p. 924].

Health Hazard

Inhalation causes severe irritation of respiratory system. Liquid causes severe burns of eyes and skin. Ingestion causes severe burns of mouth and stomach.

Chemical Reactivity

Reactivity with Water Reacts violently to form hydrogen chloride fumes (hydrochloric acid); Reactivity with Common Materials: Reacts with surface moisture to form hydrochloric acid which corrodes metals and generates flammable hydrogen gas; Stability During Transport: Stable; Neutralizing Agents for Acids and Caustics: Flush with water and rinse with sodium bicarbonate or lime solution; Polymerization: Not pertinent; Inhibitor of Polymerization: Not pertinent.

Safety Profile

Moderately toxic by ingestion and inhalation. A corrosive irritant to skin, eyes, and mucous membranes. A very dangerous fire hazard when exposed to heat, flame, or by chemical reaction. May be ignited by spark or impact. Spontaneously flammable in air. Explosive reaction with acetonitrile + diphenyl sulfoxide. Will react with water or steam to produce heat and toxic and corrosive fumes. Can react vigorously with oxidizing materials. To fight fire, use CO2, dry chemical. When heated to decomposition it emits toxic fumes of Cl-. See also CHLOROSILANES.

Trichlorosilane Preparation Products And Raw materials

Raw materials

Preparation Products

Trichlorosilane Suppliers

Global( 123)Suppliers
Supplier Tel Fax Email Country ProdList Advantage
Henan DaKen Chemical CO.,LTD.
+86-371-55531817 CHINA 21676 58
Henan Tianfu Chemical Co.,Ltd.
0371-55170693 CHINA 20672 55
Shanghai Time Chemicals CO., Ltd.
+86-021-57951555 CHINA 1365 55
Mainchem Co., Ltd.
+86-0592-6210733 CHINA 32447 55
+86 21 5161 9050/ 5187 7795
+86 21 5161 9052/ 5187 7796 CHINA 24191 60
career henan chemical co
+86-371-86658258 CHINA 30001 58
Win-Win Chemical CO., Limited
0086-577-56994596 CHINA 999 58
Chemwill Asia Co.,Ltd.
86-21-51861608;;; CHINA 23980 58
Haihang Industry Co.,Ltd
+86 531 8582 1093 CHINA 8921 58
Xiamen AmoyChem Co., Ltd
+86 592-605 1114 CHINA 6372 58

View Lastest Price from Trichlorosilane manufacturers

Image Release date Product Price Min. Order Purity Supply Ability Manufacturer
2018-08-12 Trichlorosilane
US $1.00 / KG 1G 99% 100kg career henan chemical co

Trichlorosilane Spectrum

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