| Identification | Back Directory | [Name]
TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV), | [CAS]
19782-68-4 | [Synonyms]
TDMAH
TDMAH: Hf(N(CH3)2)4
Hafnium(4+) dimethylamide
Hafnium tetradimethylamide
Dimethylamine hafnium(4+) salt
Tetrakis(dimethylamino)hafnium(IV) 99.999%
TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV), 99.99+%
Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2% Zr) TDMAH
Tetrakis(dimethylamido)hafnium(IV) packaged for use in deposition systems
Tetrakis(dimethylamido)hafnium(IV),TDMAH, Tetrakis(dimethylamino)hafnium(IV)
Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH, PURATREM, 72-8000, contained in 50ml Swagelok(R) cylinder (96-1071) for CVD/ALD
Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH, PURATREM, 72-8000, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD | [Molecular Formula]
C8H24HfN4 | [MDL Number]
MFCD01862473 | [MOL File]
19782-68-4.mol | [Molecular Weight]
354.796 |
| Chemical Properties | Back Directory | [Melting point ]
26-29 °C(lit.)
| [Boiling point ]
85°C/0.1mm | [density ]
1.098 g/mL at 25 °C | [Fp ]
109 °F
| [form ]
crystal | [color ]
colorless to pale yellow | [Specific Gravity]
1.40 | [Hydrolytic Sensitivity]
8: reacts rapidly with moisture, water, protic solvents | [Sensitive ]
moisture sensitive, store cold | [InChI]
InChI=1S/4C2H6N.Hf/c4*1-3-2;/h4*1-2H3;/q4*-1;+4 | [InChIKey]
ZYLGGWPMIDHSEZ-UHFFFAOYSA-N | [SMILES]
[Hf](N(C)C)(N(C)C)(N(C)C)N(C)C | [CAS DataBase Reference]
19782-68-4 |
| Hazard Information | Back Directory | [Uses]
Used as precursor for atomic layer deposition of Hafnium Oxide nanolaminates, which are used as a reploacement for Silicon oxide in semiconductor devices. | [General Description]
Please inquire for bulk quantity, pricing, and packaging options. | [reaction suitability]
core: hafnium |
|
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Domole Scientific Gold
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13275595566; 13275595566 |
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http://www.domole.com/ |
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Sigma-Aldrich
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LaaJoo
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Henan Alfachem Co.,Ltd.
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3A Chemicals
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400-668-9898 |
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www.3achem.com |
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Shanghai UCHEM Inc.
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+86-18930848214 +86-021-56762820 |
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http://www.myuchem.com/ |
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