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ChemicalBook CAS DataBase List TITANIUM NITRIDE
25583-20-4

TITANIUM NITRIDE synthesis

2synthesis methods
The most commonly used methods for synthesizing titanium nitride thin films are physical vapor deposition (PVD, usually with sputter deposition, cathodic arc deposition or electron beam heating) and chemical vapor deposition (CVD). Both methods involve su
-

Yield:-

Reaction Conditions:

with nitrogen in gasmicrowave discharge, total pressure ca. 500 mTorr; laser induced fluorescence monitoring;

References:

Steimle, T. C.;Shirley, J. E.;Jung, K. Y.;Russon, L. R.;Scurlock, C. T. [Journal of Molecular Spectroscopy,1990,vol. 144,p. 27 - 31]

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